Inspecting device for wafer

Abstract

Abstract PURPOSE:To reduce the occupying area of an inspecting device by disposing wafer conveying means on the front face of a wafer prober and an IC tester on the back face, and integrating them. CONSTITUTION:A conveyor 22 is provided at the front of a prober 20 having a structure that a microscope 20C is disposed at the intermediate position of stages 20A, 20B symmetrically provided, and an IC tester 24 is provided at the rear. Thus, a wafer is conveyed to a proper position by conveying means 22A, to be placed from a wafer carrier 22B to the stages 20A, 20B. THE-BOX 24A, 24B of the tester 24 are moved on the stages 20A, 20B to contact a probe pin with a chip on the wafer, obtained information is transferred to the tester 24 which judges the propriety of the device.

Inventors

• 👤 Katsuyuki Akagawa
• 👤 赤川　勝幸

Bibliographic Details