JPS628397A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
semiconductor equipment
Assignee: Hitachi Ltd
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Filing: 1985-07-03
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Granted: —
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Expires: 2005-07-03
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Hideo Nakamura
- 👤 英夫 中村
- 👤 Terumi Sawase
- 👤 沢瀬 照美
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-26 11:08
CPC Classifications
—
Claims Analysis
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References Cited (Backward Citations)
JPS58139265A
Cited
JPS59191196A
Cited
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