Signal charge detector

Abstract

Abstract PURPOSE:To obtain a signal charge detector provided with highly sensitive detecting capability, by separating a channel stopper region and a source region, thereby largely reducing the value of a junction capacitor formed by the source region. CONSTITUTION:An MOS transistor 20 is composed of a source region 1, a drain region 2, a gate electrode 3 and the like. The source region 1 is separated from an end part 5a of a channel stopper region 5 by 1-5mum. In order to separate the source region from the channel stopper region 5, a part of the shape of a mask is changed when the channel stopper region 5 is formed. By separating the source region 1 from the channel stopper region 5, a junction capacitor disappears. Instead of said capacitor, a junction capacitor C3 is added between the side surface of the source region 1 and a P-type semiconductor substrate 4. A junction capacitor CFj formed by the source region 1 is largely reduced.

Inventors

• 👤 Kazuo Miwata
• 👤 三輪田　和雄

Bibliographic Details