Production of compound thin film consisting of group ii and group vi element

Abstract

Abstract PURPOSE:To produce the titled excellent-quality compd. thin film consisting of group II and group VI elements, with less defects and having uniform thickness by decomposing a group II alkyl compd. or a group VI compd. and alternately introducing the decomposition products onto the growth surface of a substrate. CONSTITUTION:In a reaction chamber 1 which is evacuated to a prescribed pressure, an alkyl compd. contg. a group II element such as dimethylzinc and a compd. contg. a group VI element such as H2S are alternately introduced from respective introducing pipes 4 and 5, at least one of the compds. is decomposed by a preheater 6, etc., and the decomposition product is heated to a prescribed temp. by a heater 12, etc., and introduced onto the growth surface of a substrate 9. Consequently, an excellent-quality compd. thin film consisting of group II and group VI elements is formed on the substrate 9.

Inventors

• 👤 Masayasu Ishiko
• 👤 雅康 石子

Bibliographic Details