Pressure distribution detector

Abstract

Abstract PURPOSE:To readily and accurately obtain a pressure distribution detector which is reduced in size and facilitated in high resolution by providing a plurality of pressure sensors of matrix shape formed by a predetermined method on a semiconductor substrate, and sensor scanning means for detecting the output signals by sequentially scanning the sensors. CONSTITUTION:A strain gauge 46 is disposed on an etching resistant insulating diaphragm film 44 on a semiconductor substrate, and is coated with an insulating protective film 48. Part of the substrate is removed by etching through an inlet 50 to form a pressure reference chamber 52. While the chamber 52 remains in vacuum, the inlet 50 is sealed by a sealer 56. Sensors 100 in which a plurality of pressure sensors 100 are aligned in a matrix shape are sequentially scanned through sensor scanning means 200 to sequentially detect the resistance change of the gauge 46 as electric signals to measure the dynamic change of the pressure distribution applied to the sensors 100 in a real-time in high resolution.

Inventors

• 👤 Susumu Sugiyama
• 👤 進 杉山
• 👤 Takashi Suzuki
• 👤 隆司 鈴木
• 👤 Mitsuharu Takigawa
• 👤 瀧川　光治

Bibliographic Details