Structure of electrode

Abstract

Abstract PURPOSE:To reduce cross talk due to electrostatic coupling between electrodes, by arranging the positions of bonding pads so as to form the difference in levels with neighboring bonding pad parts. CONSTITUTION:On the surface of an element-material flat plate 1, taking-out electrodes 2a, 2b, 2c... from a light receiving part of an element, which is arranged on the flat plate 1 in a linear shape, and bonding pad parts 13a, 13b, 13c...; 23a, 23b, 23c...; 33a, 33b, 33c..., which are connected to the taking-out electrodes, are arranged so as to form the difference in levels. The electrodes 2a, 2b, 2c...; 13a, 13b, 13c...; 23a, 23b, 23c...; 33a, 33b, 33c... are formed by selective etching of silver. Therefore, stray capacitance is decreased by about 2/3 in comparison with the conventional examples. Thus electric cross talk is decreased, and resolution is improved.

Inventors

• 👤 Hiroyuki Seto
• 👤 弘之 瀬戸
• 👤 Katsuhiko Tanaka
• 👤 克彦 田中

Bibliographic Details