Gas laser apparatus

Abstract

Abstract PURPOSE:To control the output of a laser device smoothly along a broad range, by connecting the first power source to a discharge electrode through the first stabilizing resistor, and connecting the second power source to the discharge electrode through the second stabilizing resistor. CONSTITUTION:An excimer power source 14 is supplied to a circuit, and a small current discharge is secured along the entire electrodes. Then, a main discharge power source 12 is supplied to the circuit, and the normal operation is started. At this time, the discharge current, when the power source 14 is turned ON, is determined so that the current is less than a laser oscillating threshold. The resistance value of a ballast resistor 15 for an excimer is deter mined so that the discharge of all cathodes 9b can be maintained by the dis charge current from the power source 14. In this constitution, the current can be varied along the broad range, and the discharge in a small current region can be maintained stably.

Inventors

• 👤 Sakae Ikuta
• 👤 栄 生田
• 👤 Yukihiro Mikuni
• 👤 三国　幸宏

Bibliographic Details