Bubbling device for liquid raw materials

Abstract

Abstract PURPOSE:To effectively prevent the fluctuation in the rate of evaporation arising from pulsation by hermetically closing the top end of a carrier gas supply pipe and releasing a carrier gas into a liquid raw material from small holes bored to the circumferential surface of the pipe near the top end thereof by shifting the positions in the circumferential direction. CONSTITUTION:The carrier gas 5 past a flow rate controller 4 is released through the carrier gas supply pipe 8 from the small holes 10 thereof as bubbles 11 into the liquid raw material 1 in a hermetic vessel 2 to evaporate the above- mentioned liquid raw material 1. A resulted gaseous mixture 6 is supplied through a pipe 7 into a reaction chamber (not shown). The top end of the carrier gas supply pipe 8 to be immersed into the liquid raw material 1 of the bubbling device constituted in the above-mentioned manner is hermetically closed by an end plate 9 and plural pieces of the above-mentioned small holes 10 are provided thereto by shifting the positions thereof in the circumferential direction. The small holes are preferably uniformly provided in the positions of approximately the same depth from the level of the liquid raw material 1. The pulsation of the gaseous flow is thereby minimized and the fluctuation in the evaporation rate of the liquid raw material 1 is averted.

Inventors

• 👤 Hidenori Kamei
• 👤 英徳 亀井

Bibliographic Details