Handler for wafer conveyance

Abstract

Abstract PURPOSE:To provide a titled handler which serves to both recover and feed and enables taking-out of a cassette from an arbitrary spot in a cassette, by providing a timing gear mechanism which regulates the moving timings of a first and a second arm. CONSTITUTION:In prior to take out a wafer 3 from a cassette 2, a total unit is vertically moved, and is set in a position suitable to insert a finger 1. When a proper position is detected, a rotation instruction is outputted from an electric instruction part to a motor for driving placed in an arm expansion driving part to rotate a shaft 4a and a gear 28a. A first arm 7a and a second arm 5a are so constituted as to make a pair, and since the tips of the first arms 7a and 7b are constrained by the finger 1, the figure 1 enters the cassette 2 along with lateral rotation of first arms 7a and 7b based on the second arms 5a and 5b. When the shafts 4a and 4b are rotated in a given rotation angle arc and the finger 1 is inserted in the cassette 2, the finger 1 is lifted up, and the wafer 3 is placed on the finger 1.

Inventors

• 👤 Shunzo Imai
• 👤 今井　俊三
• 👤 Teruya Sato
• 👤 光弥 佐藤

Bibliographic Details