Optical probe device

Abstract

Abstract PURPOSE:To simply obtain an optical probe of semiconductor by introducing a probe light from the end sphere of an optical fiber incident to a semiconductor light emitting element, and observing a photovoltaic current or a photovoltaic voltage generated at the semiconductor while moving the incident position to simplify the configuration of an optical probe unit to shorten the measuring time. CONSTITUTION:A semiconductor light emitting element 1 of an article to be measured is of an InGaAsP/InP buried hetero structure semiconductor laser, and emits 1.3mum of wavelength. The radius of curvature of an end sphere 3 formed at one end of a single mode optical fiber 2 in a spherical shape is 10mum. The light emitted from a light source 4 equal in oscillation wavelength to the emitting light wavelength of the element 1 is propagated in the fiber 2, then emitted from the sphere 3, and incident as a probe light to the element 1. An optical current or voltage generated at the element 1 by the probe light is measured by a detector 5. The fiber 2 is held by a chuck 6, which is moved by a fine adjusting unit to finely move the incident position of the light to the element 1 in X and Y directions.

Inventors

• 👤 Takeshi Kato
• 👤 猛 加藤
• 👤 Kenichi Mizuishi
• 👤 賢一 水石

Bibliographic Details