Semiconductor device manufacturing system

Abstract

Abstract PURPOSE:To make a system more efficient and permit wrong operations to be diminished by providing a monitor at an entrance of respective manufacturing devices and taking a necessary step so that a real time indication for a working procedure could be offered if it is required to revise the above indication, in addition to presuming and memorizing an estimated time of the completion of a process which is still under processing with the aid of a central computer. CONSTITUTION:Monitors 2 such as ID readers or mark readers on wafers and the like as well as checking instruments 4 for processing results are arranged in front and rear of respective manufacturing devices 3. Plural lots of different sorts are fed from a lot carrying-in part 6 and introduced into respective manufacturing devices 3 by a central computer 1 through a lot conveying path 5. After then, respective lots ars processed in sequence at necessary processes and if it is indispensable for the manufacturing devices 3 of the next process to wait for some lots to come, such lots are introduced into a lot waiting part 7. In this way, a management of the central computer 1 allows each lot to be processed at the necessary processes and to reach a taking-out part 8. Thus, this approach always helps maintain optimum operational procedures of respective devices in a system.

Inventors

• 👤 Jiro Yoshigami
• 👤 二郎 由上
• 👤 Kiyohiko Funakoshi
• 👤 船越　清彦

Bibliographic Details