Telecentric optical system lighting device

Abstract

Abstract PURPOSE:To prevent ununiform light quantity on a pupil surface of an illuminating light by dividing the incident luminous flux which is made incident on one end face of a random fiber bundle for leading the luminous flux which has condensed light from a light source, to an object side, into plural fluxes, and distributing them uniformly in the other end face. CONSTITUTION:The illuminating light from a light source 1 is focused to an incident end face 20a of a random fiber bundle 20 by a condensing lens 2 and a concave mirror 3, and emitted from an emitting and face 20b. Its light travels to a lighting system lens 5 through an aperture diaphragm 4, condensed and becomes a parallel luminous flux, reflected along an objective lens optical axis by a half-transmission flux, reflected along an objective lens optical axis by a half-transmission prism 6, focused at a pupil position of the first objective lens 8 through the second objective lens 7, and an image of the aperture diaphragm 4 is formed at its pupil position together with an image of the emitting end face 20b. The light becomes a parallel luminous flux again and projected to an object to be inspected 10 from the first objective lens 8, and illuminates vertically the object to be inspected 10, along the optical axis. The random fiber bundle 20 is formed by bundling plural optical fibers, making a line of fibers of one end face different from a line of fibers of the other end face, and twisting them together so that they become an irregular arrangement each other.

Inventors

• 👤 Shuhei Takagi
• 👤 高木　秀平
• 👤 Takeshi Sudo
• 👤 武司 須藤

Bibliographic Details