Measurement for clearness

Abstract

Abstract PURPOSE:To enable automatic measurement of clearness at a high accuracy, by detecting 'waviness' depending on variations in detection point intervals at the time when a pair of slit lights are projected to a surface to be measured and both reflected slit lights are detected with a line sensor arranged orthogonal thereto. CONSTITUTION:A pair of parallel slit lights LS1 and LS2 are projected at a fixed interval to a surface 4a to be measured of a sample 4 from a measuring device 1. Then, the measuring device 1 is moved parallel in the direction of the arrow A as slit directions of the slit lights LS1 and LS2 with a scanner 2 detecting the reflected lights L'S1 and L'S2 with a line sensor. The detection signal obtained meanwhile are processed in a control panel 3. As a result, a data showing clearness is displayed 3a. The control panel 3 also controls the light source in the measuring device 1, the line sensor and the unit 2. Thus, 'waviness' as detected when the reflected slit lights are slightly deflected in part is detected depending on variations in the detection point intervals and thus the clearness can be measured automatically at a high accuracy.

Inventors

• 👤 Masahiro Adachi
• 👤 正博 足立
• 👤 Motoyuki Suzuki
• 👤 基之 鈴木

Bibliographic Details