Burn-in device for semiconductor apparatus

Abstract

Abstract PURPOSE:To prevent the destruction of a chip to be aged, by providing a status generation circuit on a burn-in board and controlling the drive signal output wave form of a driver circuit by a status signal so as to bring the same to a predetermined state. CONSTITUTION:From the status signal generation circuits 14 provided to burn-in boards 1-3, status signals having informations such as the test states of the boards, the kind of the boards and the number of mounting LSIs on the boards are generated and detected by the detection circuit 16 on a driver board 15 and judged by a judge circuit 17. On the basis of the judge output of said judge circuit 17, preparatory load control circuits 181-18n perform operations for controlling the preparatory loads of driver circuits 51-5n so that the driver circuits 51-5n always become constant. Therefore, the drive signal with the same wave form can be always applied to the input pin of LSI from the same driver circuit on the board in spite of the change in the number of the burn-in boards 11-13 or the change in the number of LSIs on the boards 11-13. Therefore, a burn-in test is enabled without destructing a chip to be aged.

Inventors

• 👤 Masashi Nagase
• 👤 永瀬　政志

Bibliographic Details