Optical measuring device

Abstract

Abstract PURPOSE:To make a light analysis of photoluminescence emitted from a sample over a wide wavelength range by observing the sample with high magnification and irradiating an extremely small area with laser light for excitation. CONSTITUTION:The laser light 3 for excitation is incident from beside a microscope 2 provided over the sample 1 and guided to the lower part in the optical path of the microscope 2 through a half-mirror 4, and the light is converged through an objective lens 5 to illuminate the surface of the sample 1. At the same time, the surface of the sample 1 is observed with high magnification. At this time, the angle-directional intensity distribution of photoluminescence light emitted from the extremely small irradiated area part of the sample 1 is isotropic in the vertical direction of the sample 1. Its light energy is smaller than the forbidden band width of the sample. Therefore, half of the photoluminescence light is emitted from the surface of the sample at the same side with the laser light irradiation side, and the remainder propagates downward in the sample 1 and is emitted from its reverse surface.

Inventors

• 👤 Michio Tajima
• 👤 道夫 田島

Bibliographic Details