Process and apparatus for synthesizing diamond in gaseous phase

Abstract

Abstract PURPOSE:To synthesize diamond in the gaseous phase at low temp. with high speed by decomposing and exciting a gaseous mixture consisting of hydrocarbon and H2 in the discharge of high frequency or microwave and irradiating generated plasma with ultraviolet rays or visible rays. CONSTITUTION:After setting a substrate 1 having the surface cleaned by chemical etching on a susceptor 2, the inside of a quartz reaction tube 4 is evacuated 5 to 10<-6>Torr. Then, simultaneously inside of a vacuum vessel 6 is replaced with N2 7 or evacuated 10 to 10<-6>Torr. Then, after evacuating the inside of the reaction tube 4 previously, the substrate 1 is heated to a specified temp. by a halogen lamp 12 and hydrocarbon 13 and H2 14 are introduced into the reaction tube 4, and high frequency is impressed using a high frequency oscillator 17. After generating plasma by this method the light from a generator 20 of ultraviolet rays or visible rays is irradiated, and reaction is carried out for a specified time. As the result, a diamond film is formed on the substrate at low temp. with high speed.

Inventors

• 👤 Kazutaka Fujii
• 👤 和隆 藤井
• 👤 Nobuaki Shohata
• 👤 伸明 正畑

Bibliographic Details