Manufacturing method of micro optical element

Abstract

Abstract PURPOSE:To prevent variance of lens diameter, focal length, refractive index distribution, etc. and generation of camber of base material, etc. in the prepn. of flat plate microlens by the electrolytic implantation process by providing a mask also to the side face of a sample cell. CONSTITUTION:A pattern mask 3 is coated on the bottom face of a sample cell 10 having a box shape and a mask 9 is formed also to the side face of the sample 10. Molten salt 6 is incorporated in the inside of the sample cell 10. The sample cell 2 is dipped in a molten salt bath 5 separated from the molten salt 6, and electric current is supplied to both electrodes 7, 8 arranged in the molten salt 5, 6 and electric voltage is impressed to both surfaces of the glass at the bottom of the sample cell 10, and univalent metal ion in the molten salt 5 is inplanted to the glass box by the field effect. By this process, the target flat plate microlens 4 is obtd. with good reproducibility and with high precision.

Inventors

• 👤 Masatake Matsuo
• 👤 誠剛 松尾
• 👤 Norihisa Okamoto
• 👤 岡本　則久

Bibliographic Details