Method for controlling warpage of blade for slicer
Abstract
Abstract PURPOSE:To reduce cutting allowance and improve cutting speed by holding a blade from both side and controlling warpage thereof. CONSTITUTION:A blade 1 for slicer has the structure of internal circumference blade type and is rotated by a motor at a high speed through a belt 3. Meanwhile, a silicon single crystal 4 to be cut is placed on a support table 5 which can be moved horizontally pitch by pitch and also moved vertically and is then sent to the internal circumferential opening of blade 1. A blade displacement sensor 6 which detects displacement (or warpage) of blade 1 is provided adjacently to the blade 1. A control means 7 which is provided to the one point, or several points or entire part of circumference of both side surfaces of blade 1 generates air flow or magnetic field toward both side surfaces of blade 1 in order to realize forced control of displacement or warpage on the non-contact basis. Thereby, displacement or warpage of blade 1 can be controlled in optimum. Accordingly, the cutting allowance can be reduced and cutting speed can also be improved.
Inventors
- 👤 Ryosaku Chikaoka
- 👤 近岡 良作
- 👤 Hajime Yui
- 👤 肇 油井
- 👤 Nobuo Tabata
- 👤 田畑 命生
- 👤 Kazuhiko Takahashi
- 👤 和彦 高橋
- 👤 Toshio Murayama
- 👤 村山 利雄
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