optical waveguide

Abstract

Abstract PURPOSE:To obtain a simpel and convenient optical waveguide which has high precision and low loss by forming a chalcogenite glass layer on a substrate while forming a desired waveguide with an electron beam. CONSTITUTION:The chalcogenite glass thin film 3 formed on the substrate 1 is irradiated with the electron beam 4 to form a specific three-dimensional optical waveguide 5. An organic thin film and/or organic thin film 8 which has a less refractive index than the glass thin film 3 and a thin metallic film 10 on the thin film 8 are provided on the chalocogenite glass thin film 3 where the three-dimensional optical waveguide 5 is formed. When the refractive index of the substrate 1 contacting the chalcogenite glass 3 is smaller than that of the chalcogenite glass, light is confined in the optical waveguide formed in the chalcogenite glass. When the substrate 1 uses Si, etc., having a larger refractive index than the chalcogenite glass, its surface is oxidized to produce SiO2 having a less refractive index than the chalcogenite glass preferably. This optical waveguide provided as mentioned above is simple, convenient, and inexpensive and has high precision and low loss, so this is useful for an optical integrated circuit, etc.

Inventors

• 👤 Hidemi Sato
• 👤 秀己 佐藤
• 👤 Yasuo Hiyoshi
• 👤 日良　康夫
• 👤 Aizo Kaneda
• 👤 金田　愛三
• 👤 Shigeharu Tsunoda
• 👤 重晴 角田

Bibliographic Details