Patent FR1132007A successfully refreshed from Google Patents.
JPS6139519A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
plasma processing equipment
Assignee: Hitachi Ltd
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Filing: 1984-07-31
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Granted: —
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Expires: 2004-07-31
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Noriaki Yamamoto
- 👤 山本 則明
- 👤 Fumio Shibata
- 👤 柴田 史雄
- 👤 Norio Kanai
- 👤 金井 謙雄
- 👤 Sumio Fukuda
- 👤 福田 澄雄
- 👤 Tsunehiko Tsubone
- 👤 恒彦 坪根
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-03 08:12
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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