Pyroelectric type infrared detection element

Abstract

Abstract PURPOSE:To enhance the absorptivity of infrared rays and to enhance stability, by constituting an infrared ray absorbing film from a thermet membrane wherein ultra-fine metal particles are dispersed throughout a dielectric body. CONSTITUTION:For example, a sputtering apparatus is used to form a platinum electrode 2 with a thickness of 0.2mum to a MgO substratre 1 with a thickness of about 300mum and a PbTiO3 film 3 with a thickness of about 2mum is grown on said electrode 2 and an electrode 4 is further formed onto said film 3. For example, a composition prepared by adding 5% of a ultra-fine Ni powder with a particle size of several 100 deg.C to a SiO2 powder under stirring is applied to the electrode 4 by using an electron beam vapor deposition apparatus as a target to form an infrared absorbing film 5 with a thickness of about 0.1mum to constitute an infrared detection element. By this method, output corresponding to 70% or more of the output of auric-black can be obtained and the absorptivity of infrared rays can be increased and stability can be enhanced.

Inventors

• 👤 Kenji Iijima
• 👤 賢二 飯島
• 👤 Ichiro Ueda
• 👤 一朗 上田
• 👤 Kuni Ogawa
• 👤 小川　久仁

Bibliographic Details