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JPS6134931A Expired / Lapsed JP ⏱️ 0.0 years remaining

Manufacture of silicon film

Assignee: Canon Inc
•
Filing: 1984-07-26
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Granted: —
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Expires: 2004-07-26
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Abstract

Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Inventors

  • 👤 Teruhiko Furushima
  • 👤 古島 輝彦
  • 👤 Tatsumi Shoji
  • 👤 辰美 庄司
  • 👤 Satoru Itabashi
  • 👤 板橋 哲
  • 👤 Soichiro Kawakami
  • 👤 総一郎 川上
  • 👤 Masaki Fukaya
  • 👤 深谷 正樹
  • 👤 Atsushi Yamagami
  • 👤 山上 敦士
  • 👤 Satoru Sugita
  • 👤 杉田 哲

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-10-27 19:08
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/24

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Total Claims: 0
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