Semiconductor flow velocity detecting element

Abstract

Abstract PURPOSE:To improve the responsibility by covering a speed detecting element composed of a heating element and a temperature measuring element formed on a semiconductor substrate with a material with good heat conductivity. CONSTITUTION:The flow velocity detecting element 3 having the heating element and temperature measuring element formed on the semiconductor substrate is mounted on a package 9 made of a material with superior heat conductivity, e.g. alumina ceramic, and a thin coating layer for protection is formed thereupon. Consequently, the responsibility of the semiconductor flow velocity detector is improved.

Inventors

• 👤 Masayuki Sekimura
• 👤 関村　雅之
• 👤 Shunji Shiromizu
• 👤 白水　俊次

Bibliographic Details