Graphite crucible

Abstract

Abstract PURPOSE:A graphite crucible, obtained by forming a film of thermally decomposed graphite on the surface of a graphite crucible, capable of preventing the entry of SiO2 gas into the crucible and suppressing the plastic defromation and weight increase of the crucible and useful for pulling up single crystals. CONSTITUTION:A graphite crucible obtained by heating preferably a graphite crucible for pulling up single crystals made of artificial graphite having im proved purity and mechanical strength in a chemical vapor deposition (CVD) furnace at about 2,000 deg.C by high-frequency induction heating, etc., feeding a hydrocarbon gas, e.g. propane, into the furnace using N2 gas as a carrier gas and thermally decomposing the hydrocarbon gas to form a thermally decom posed graphite film having e.g. 500mum thickness, on the surface of the graphite crucible.

Inventors

• 👤 Kimito Shioiri
• 👤 塩入　公人

Bibliographic Details