Vapor phase synthesis equipment

Abstract

Abstract PURPOSE:To make it possible to succeed gaseous phase reaction for a long time in such a state that the streams of stock gases are prevented from disturbance in a reaction part and held normally, by arranging the ring shaped supply nozzle of stock gas fast in diffusion around the supply nozzle of stock gas slow in diffusion. CONSTITUTION:In the stock gas supply part of a gaseous phase synthesizing apparatus, the supply nozzle 7 having a ring shaped gas outlet of stock gas fast in diffusion is arranged around the supply nozzle 6 of stock gas slow in diffusion. That is, a compound is adhered to and grown on the stock gas nozzle 6 in the slow diffusion side but, because the growing speed thereof becomes equal at edges in either sides of the nozzle, the compound is grown straightly without being bent. Therefore, even if the compound is adhered to the nozzle part, the streams of stock gases in the reaction part are prevented from disturbance because the shape and direction of the outlet is not changed and held normally to enable the succeeding of long-time gaseous phase reaction. In addition, because no change in generated in the blow-out direction of the stock gas, the thickness distribution of the synthesized compound becomes uniform.

Inventors

• 👤 Motoharu Kikuchi
• 👤 菊池　茂登治

Bibliographic Details