Window opening shape of external pickup metal electrode of semiconductor element

Abstract

Abstract PURPOSE:To prevent a pad electrode from corroding by providing a window opening shape with a smooth curved structure like arcuate at the inner wiring side and with a slender slit at the end in an acute angle at the reverse side. CONSTITUTION:Ultrafine particles of silicon bonded to a pad electrode in dicing step to drying step, wear chips of dicing saw and impurities in the atmosphere are secured to corners B, C, D farther from the corner A near the inner wirings by utilizing the surface tension of water. Even if a separation occurs between resin and the surface of a chip due to the use for a long period and a water film is produced in the boundary, acute corner and slender slit are formed at the corner, thereby securing the produced water film to the corners of B, C, D farther from the inner wirings. Thus, even if the pad electrode is corroded, it occurs at the farther portion from the inner wirings. Accordingly, the lifetime reaching the disconnection can be increased.

Inventors

• 👤 Fushinobu Wakamoto
• 👤 若本　節信
• 👤 Kazuya Fujita
• 👤 和弥 藤田
• 👤 Tetsuya Onishi
• 👤 哲也 大西

Bibliographic Details