Cryopump operating method

Abstract

Abstract PURPOSE:To miniaturize a frequency converter by converting only a cryopump helium refrigerator part to 60Hz by means of the converter and operating a compressor part at 50Hz when operating said refrigerator set to be operated at 60Hz with a 50Hz power source. CONSTITUTION:The refrigerator 3 of a cryopump 1 is constructed independently by a refrigerator part 4 and a compressor 5, and a driving device 12 constituted by an electric motor, e.g., 5kW rated for driving the compressor part 5 and a driving device 7 of the refrigerator part 4 are set to be driven by a power source 13 having larger frequency of, e.g., 60Hz. When driving this cryopump 1 by the power source 13 of 50Hz, only the refrigerator part 4 is converted to 60Hz by means of a frequency converter 14 and operated, and the compressor part 5 operated by the power source 13 of 50Hz, thereby enabling the frequency converter 14 used therefor to be employed as a miniaturized and cheap device in response to the small rating of the driving device 7 of the refrigerator part 4.

Inventors

• 👤 Hidetoshi Morimoto
• 👤 秀敏 森本
• 👤 Katsumi Morizumi
• 👤 守住　克己

Bibliographic Details