optical integrated circuit

Abstract

Abstract PURPOSE:To facilitate the connection of an optical fiber to an optical waveguide and to reduce the coupling loss by making a V-shaped groove in one edge of a film for forming the optical waveguide and by uniting the waveguide and the V- shaped groove to one body on the same substrate. CONSTITUTION:An epitaxial film 2 with high resistance for forming an optical waveguide is deposited on a substrate 1 by MOCVD, and a ridge 3 is formed as the optical waveguide by ion beam etching without using a mask. At this time, Au is used as an ion source, and ion beams are converged with acceleration voltage and irradiated perpendicularly to the substrate 1. The desired ridge 3 is formed by carrying out etching while moving the ion beams along the surface of the substrate 1. The core part of a single-mode optical fiber is fixed in a V- shaped groove 5 made by similar etching so that one end of the ridge 3 as the optical waveguide is brought into perfect contact with one end of the optical fiber 4. The fiber 4 is then coupled to the optical waveguide by irradiating He- Ne laser light on the fiber 4.

Inventors

• 👤 Takeyuki Hiruma
• 👤 健之 比留間
• 👤 Hiroyoshi Matsumura
• 👤 宏善 松村
• 👤 Koji Ishida
• 👤 宏司 石田
• 👤 Shinji Sakano
• 👤 伸治 坂野

Bibliographic Details