Stocker of semiconductor wafer cassette

Abstract

Abstract PURPOSE:To determine the position of a shelf in high accuracy without raising dust by providing guide rails in front and back to move the shelf for a semiconductor wafer cassette vertically in many stages and using a rail for transfer of the shelf from the front rail to the back rail. CONSTITUTION:Among shelves 20-27, the shelves 24-26 are held by the first guide rail 28 and the second guide rail. The shelf 24 is held by guides 31, 32 inserted in the first guide rail and guides 36, 37 provided on the opposite side and inserted in the second guide rail. The other shelves are also held in the same way. In order to transfer the shelf 27 from front to back, the shelf 27 is held by the third guide rail 29 and the fourth guide rail and slided horizontally to the right direction, then transferred to the fifth guide rail and the sixth guide rail. When the shelf 23 is moved to the front of a stocker, the shelves 20-22 are brought down stage by stage by a vertical movement mechanism 35.

Inventors

• 👤 Ryozo Sato
• 👤 佐藤　亮三

Bibliographic Details