Bonding device
Abstract
Abstract PURPOSE:To enhance the positioning accuracy as well as to enable to perform a high speed responsiveness operation of the title device by a method wherein a linear motor is used as the source of vertical movement of a bonding arm. CONSTITUTION:A linear motor 30 is used as the source of vertical movement of a bonding arm 16. When the motor 30 is driven, a box part 31 performs a linear movement, and an L-type arm 33 is operated, thereby allowing the arm 16 to perform a vertical movement. As a result, the deterioration in positioning accuracy caused by the movement changing mechanism, which is required for a rotary motor, and the lowering in responsiveness in a high speed operation can be prevented. Also, a highly accurate positioning and a high speed responsiveness can be accomplished.
Inventors
- 👤 Shunichiro Fujioka
- 👤 俊一郎 藤岡
Bibliographic Details
Claims Analysis
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