Bubbler

Abstract

Abstract PURPOSE:To enhance the controllability of the quantity of volatile substance vapor carried by a method wherein, in the case of a bubbler with which a volatile substance is evaporated in carrier gas, a granular substance which does not react for said volatile substance is mixed into the solution of volatile substance. CONSTITUTION:The tip 4 of a gas introducing tube 2 is opened in stainless steel grains 33. Triethylgallium (TEG) 34 which is a volatile substance is placed in a bubbler. At this time, H2 is used as carrier gas. The partial pressure of TEG is measured as follows. The valves 38 and 39 located at both ends of a chamber 37 are closed in the order of 38 and 39, TEG is gathered by cooling the trap 40 to be used for gathering by cooling located at the lower part of said chamber using liquid nitrogen, pressure is measured using a manometer, and said partial pressure is determined by the difference between the measured pressure and the pressure of H2 cooled by the liquid nitrogen. As the bubbles of carrier gas in TEG 34 are small in size and they ascend in a uniformly spread state, the degree of scattering of TEG 34 in the bubbler is small, and the TEG seldom adheres to the upper part of the bubbler.

Inventors

• 👤 Masaji Yoshida
• 👤 吉田　政次

Bibliographic Details