Device for supplying solid source for evaporation in vapor growth apparatus

Abstract

Abstract PURPOSE:To expand the evaporation area of solid sources for evaporation by disposing a multi-stage shelf consisting of plural sheets of trays in a vessel for housing the solid source for evaporation and placing respectively the solid sources for evaporation on the respective trays. CONSTITUTION:A vessel 32 having an inflow port 17 and an outflow port 13 for carrier gas G is housed into a thermostatic chamber 34 which houses solid sources 15 for evaporation and evaporates the sources 15. A multi-stage shelf 33 disposed with plural sheets of trays 33a in multiple stages apart at a prescribed spacing from each other in a vertical direction is housed and disposed in said vessel 32. The solid sources 15 for evaporation are placed atop the respective trays 33a.

Inventors

• 👤 Akira Tabuchi
• 👤 明 田渕

Bibliographic Details