Manufacture of laminated type thin film solar battery

Abstract

Abstract PURPOSE:To form an integrated high output solar battry by a method wherein the auto-doping among semiconductor layers is inhibited by lamination to a multilayer, utilizing the advantages of the process of manufacturing amorphous semiconductor. CONSTITUTION:Ag series electrode paste 2 is pattern-printed on a glass substrate 1 covering the photo receiving surface, and is then calcined. Next, an In2O3- SnO2 transparent conductive film 3 is vapor-deposited by an electron beam vapor-deposition device. Next, a mixed gas with mono silane added to the base of hydrogen gas is used as the raw material gas, amorphous unit solar battery layers P<+>/N<->/N<+> (4, 6, and 6 in the figure) are grown by means of a diode type glow discharge device. As for the glass substrate 1 whereon the first stage unit solar battery has been formed, the second stage unit solar battery of said solar battery layers P<+>/N<->/N<+> (8, 9, and 10 in the figure), and the third stage unit solar battery of said solar battery layers (12, 13, and 14 in the figure) are formed. Finally, the back surface electrode 15 is formed by both use of the methods of electroless plating and electrolytic plating with Ni.

Inventors

• 👤 Katsumi Imaizumi
• 👤 今泉　克美
• 👤 Yutaka Yamauchi
• 👤 豊 山内

Bibliographic Details