← Back to Patent Explorer
JPS6035519A Expired / Lapsed JP ⏱️ 0.0 years remaining

Film thickness monitor device

Assignee: Hitachi Microcomputer System Ltd
•
Filing: 1983-08-08
•
Granted: —
•
Expires: 2003-08-08
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Inventors

  • 👤 Tatsufumi Nishina
  • 👤 仁科 達史
  • 👤 Shinichi Suzuki
  • 👤 慎一 鈴木
  • 👤 Hiromitsu Enami
  • 👤 弘充 榎並

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-11-05 21:15
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616

Claims Analysis

Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Maintenance schedule is calculated for granted US utility patents.

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag