Pyroelectric type element

Abstract

Abstract PURPOSE:To obstruct generation of a spike noise due to an electric discharge, and to raise a temperature detecting accuracy of a pyroelectric infrared-ray sensor by providing an element body in which a pyroelectric element having an infrared-ray absorbing metallic film is used as a photodetecting part, a reflecting film formed on the rear side, a discharge preventing film for covering the surface, and an electric conductor wiring. CONSTITUTION:A pyroelectric type element 30 is installed to the center part of a substrate 41. An element supporting frame 20 is formed on the rear side of the pyroelectric type element 30. An element body 21 consisting of a single crystal thin piece of tantalic acid lithium, etc. is installed onto the element supporting body 20. A reflecting film 22 consisting of a metallic thin film is formed on the rear side of the element body 21, and held in the ground potential through the supporting frame 20. A photodetecting part 23 consisting of an infrared-ray absorbing metallic film is formed on the center part of the main surface of the element body 21. Also, an electric conductor wiring 24 connected to the photodetecting part 23 is formed on the main surface. The surface of the element body 21 containing the electric conductor wiring 24 and the photodetecting part 23 is formed by a discharge preventing film 25 having an infrared- ray transmitting property.

Inventors

• 👤 Tadahiko Katayama
• 👤 片山　忠彦

Bibliographic Details