JPS6020568A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
semiconductor equipment
Assignee: Hitachi Ltd
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Filing: 1983-07-15
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Granted: —
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Expires: 2003-07-15
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Akira Muramatsu
- 👤 彰 村松
- 👤 Hiroshi Ikeda
- 👤 洋 池田
- 👤 Hideki Yasuoka
- 👤 秀記 安岡
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-05 01:05
CPC Classifications
H; H10; H10D; H10D8/00; H10D8/60
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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