Ultrasonic transducer

Abstract

Abstract PURPOSE:To retain securely an electric insulating property without the occurrence of swarf of the reverse electrode at the time of making a cut groove by means of cutting by carrying out a preliminary cutting so that an extremely shallow cut groove can be made on a piezoelectric ceramic diaphragm. CONSTITUTION:After a piezoelectric ceramic diaphragm 8 and a flexible substrate 9 are joined with an adhesive 10, an extremely shallow cut groove 11 is formed by a preliminary cutting on the flexible substrate 9, a reverse electrode 3 and the piezoelectric ceramic diaphragm 8 so that the reverse electrode 3 can be divided and connected to an individual electric terminal 2 formed on the flexible substrate 9. The preliminary cutting is to cut the flexible substrate halfway and to retain the un-cut part as it is, thereby facilitating further assembly. Such processed reverse electrode 3 of the piezoelectric ceramic diaphragm 8 is adhered on a ultrasonic wave adsorbing body 7, and a surface electrode 4 and the piezoelectric ceramic diaphragm 8 are cut in depth when they reach the ultrasonic wave adsorbing body 7.

Inventors

• 👤 Toshikatsu Doi
• 👤 土井　敏克

Bibliographic Details