Silent discharge gas laser device

Abstract

Abstract PURPOSE:To emit a stable laser output by cooling a dielectric electrode by separately using evaporated heat based on the phase change of coolant having low specific dielectric constant, thereby reducing the induced current flowed through the coolant and simplifying a silent discharge gas laser device. CONSTITUTION:Specific dielectric constant of coolant 17 formed of insulating solution such as ammonia or halogenated fluoride carbon sealed in a dielectric electrode is approx. 2-5, thereby remarkably reducing the induced current flowed in the coolant 17. When the discharging power is approx. 20kW, in case of halogenated fluoride carbon as the coolant 1, its evaporation latent heat is 43.5cal/g (182.7J/g). Accordingly, the coolant 17 is evaporated at the ratio of approx. 328g. per minute to apply heat to the outer cylinder for forming a dielectric electrode 3, thereby liquefying it to return to the original. The heat applied to the outer cylinder is effectively dispersed to the exterior through heat sink fins 18. At this time, when the fins 18 are exposed with the circulating flow of the gas laser medium, its heat sink effect can be remarkably improved.

Inventors

• 👤 Kimiharu Yasui
• 👤 公治 安井
• 👤 Shigenori Yagi
• 👤 重典 八木
• 👤 Shuji Ogawa
• 👤 小川　周治
• 👤 Masaki Kuzumoto
• 👤 昌樹 葛本

Bibliographic Details