Thin-film-type photoelectric convertion element and production thereof

Abstract

Abstract PURPOSE:To enable the characteristic evaluation of a photoelectric converting material film to be performed before completing all the process, by constructing the element such that image light from an original is recived from the underside of the substrate. CONSTITUTION:An opaque metallic layer 22 is formed on a transparent substrate 21. A main aperture 26 and a subaperture 27 are then provided in the layer 22 and a transparent conductive film 24 is formed over there. This aperture 26 serves as a light-receiving section for receiving image light 10. A conductive material to be a discrete electrode 25 is formed on the film 23. On the other hand, a subelectrode is patterned independently in a position corresponding to the subaperture 27. According to this construction, the discrete electrode is patterned and the static characteristic of the element is evaluated after checking presence of abnormal growth or defective film and evaluating the uniformity of the ratio of bright current to dark current. Therefore, if any defective film is found in the device substrate, it can be rejected.

Inventors

• 👤 Yuji Kajiwara
• 👤 梶原　勇次

Bibliographic Details