Method for handling breaking accident of ampul in synthesis and growth furnace for compound semiconductor crystal containing phosphorus

Abstract

Abstract PURPOSE:To make it possible to burn safely phosphorus and hold the unreacted phosphorus, by introducing air slowly in a vessel in a nitrogen atmosphere in breaking an ampul to burn the phosphorus, bubbling the evolved gas into water, and releasing the gas. CONSTITUTION:An ampul 11 containing a boat 9 carrying an element of Group IIIand phosphorus 10 is inserted into a tubular furnace 8 provided in a high- pressure vessel 1, and heated to grow a compound semiconductor crystal in a synthesizing and growing furnace. In the above-mentioned furnace, the interior of the vessel 1 is a nitrogen atmosphere to synthesize and grow the crystal. If the ampul 11 is broken, the temperature of the vessel 1 is reduced to introduce 7 by small portions into the vessel 1 while monitoring the temperature and presure in the vessel 1 to burn the phosphorus 10 and pass the evolved high-temperature gas through a reservoir tank 3. The gas is bubbled into water and then discharged to the outside air. Thus, harmful phosphorus can be safely burned, and the unreacted phosphorus can be held by utilizing the water-insolubility of the phosphorus.

Inventors

• 👤 Yoshimasa Masukata
• 👤 舛方　義政
• 👤 Junjiro Shirokawa
• 👤 潤二郎 城川
• 👤 Masatoshi Sugihara
• 👤 正俊 杉原
• 👤 Kazuo Kurihara
• 👤 栗原　和郎

Bibliographic Details