Low pressure synthesis device for diamond

Abstract

Abstract PURPOSE:To form efficiently a uniform diamond coating on the surface of tools and parts by disposing thermion radiating filaments, base body support and gas flow regulating wall in common use as a heater for heating a base body into a synthesizing vessel concentrically with a gas introducing pipe provided at the center of said vessel. CONSTITUTION:An outside wall 1 of a synthesizing vessel 1 disposed concentrically with a gas introducing pipe 3 provided at the center of the synthesizing vessel and a gas flow regulating wall 5 attached with base body heaters are removed and a base body for wear resistant tools, cutting tools, wear resistant parts, etc. is attached to a base body support 4 and thereafter the wall 1 and the wall 5 are installed. The inside of the vessel is then evacuated by a vacuum pump 9 and after electricity is conducted from a power source 7 to the base body heaters to heat the base bodies to 300-1,100 deg.C, a gaseous mixture consisting essentially of H2-CXHY is introduced through an introducing pipe 2 into the vessel. Electric current is conducted at the same time to thermion radiating filaments 3 to heat same to about 1,300 deg.C surface temp. The pressure is regulated to 0.1-100 Torr by opening a valve 8 and a diamond film is formed on the base body surface.

Inventors

• 👤 Akio Nishiyama
• 👤 昭雄 西山
• 👤 Noribumi Kikuchi
• 👤 菊地　則文
• 👤 Takayuki Shingyouchi
• 👤 新行内　隆之
• 👤 Hiroaki Yamashita
• 👤 山下　博明

Bibliographic Details