JPS60106968A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Heating mechanism for appratus for forming film in vacuum
Assignee: Hitachi Ltd
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Filing: 1983-11-16
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Granted: —
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Expires: 2003-11-16
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Yutaka Saito
- 👤 裕 斉藤
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-04 00:45
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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