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JPS599173A Expired / Lapsed JP ⏱️ 0.0 years remaining

Method and apparatus for controllable etching of material

Assignee: Applied Biosystems Inc
•
Filing: 1983-06-22
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Granted: —
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Expires: 2003-06-22
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Abstract

Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Inventors

  • 👤 リチヤ−ド・エイチ・ブル−ス
  • 👤 アラン・ア−ル・ラインバ−グ

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-11-03 16:23
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32174; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334; H01J2237/3343; H01J2237/3344; H01J2237/3345

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