Manufacture of magnetic recording medium

Abstract

Abstract PURPOSE:To obtain an iron nitride system magnetic thin film with large saturated magnetism and coercive force by a method wherein an incident angle of iron vapor, ionizing rate of iron atom, nitrogen gas pressure and ratio of nitrogen ion to iron and iron ion are within specific ranges respectively. CONSTITUTION:A method to form a magnetic film composed of iron and iron nitride on the surface of non-magnetic base material by deposition in a nitrogen gas atmosphere is introduced. In this method, an incident angle of iron vapor stream against the base material surface is not less than 50 deg., not less than 10% of vaporized iron atoms are ionized by application of DC field and nitrogen gas pressure is not more than 10<-3>Torr and is also determined in such a manner that the ratio of nitrogen molecule ions to iron and iron ions which come flying toward the base material surface becomes within the range of 0.05-0.5.

Inventors

• 👤 Shigehisa Harada
• 👤 茂久 原田
• 👤 Tetsuo Tatsuno
• 👤 龍野　哲男
• 👤 Setsu Arikawa
• 👤 有川　節
• 👤 Hitoshi Ogawa
• 👤 等 小川

Bibliographic Details