Manufacture of photoelectric converter

Abstract

Abstract PURPOSE:To improve the manufacturing yield and to improve the reliability of a photoelectric converter by removing a shorted or leaked portion or region by means of laser trimming. CONSTITUTION:A semiconductor 1 has a first electrode 5, a non-single crystal semiconductor 4, to which hydrogen or halogen element is added and which has at least a P-I-N junction, and the second electrode 3, and the two electrodes are connected to a detector 6 through a terminal for detecting the improper portion. Improper portions 18, 19 are scanned, for example, by a visible light such as He-Ne laser or Ar laser 8 to detect the output, a trimming laser 12 is emitted from a YAG laser 9 through a half mirror 10 and a mirror 11 to remove the improper portions. A nitrided silicon insulator 21 is coated to form a passivation film, polyimide is coated to improve the moisture resistance, and a leakage current between the P and the N in a trimming unit is prevented.

Inventors

• 👤 Shunpei Yamazaki
• 👤 舜平 山崎

Bibliographic Details