Combustion of monosilane gas in treating exhaust gas

Abstract

Abstract PURPOSE:To make it possible to burn monosilane gas completely without making SiO2 agglometrate at the top end of a nozzle by a method wherein an inner pipe is made shorter than an outer pipe and undulating vibrations are given to the combustion atmosphere around the top end of the nozzle formed by the inner pipe. CONSTITUTION:When the exhaust gases are injected from the nozzle 6a, air introduced from an air inlet pipe 23a is injected toward the top end of the nozzle 6a from a small cylinder 23 so that monosilane gas SiH4 is subjected to the air and burns explosively. As a result, undulating vibrations generating due to a convection resulting from the combustion of the monosilane gas, a swirling air current running against a distributor 28 and vibrations caused by a combustion flame running against the distributor 28 are transmitted to the exhaust gas combustion atmosphere A so that a metallic oxide SiO2 generating from the monosilane gas SiH4 falls down without adhering to the top end of the nozzle 6a. Consequently, it is possible to burn the monosilane gas completely without making SiO2 agglomerate at the top end of the nozzle.

Inventors

• 👤 Sakanobu Soneda
• 👤 曾根田　栄悦

Bibliographic Details