Voiceless discharge system gas laser device

Abstract

Abstract PURPOSE:To enable to clearly perform division between a discharge part and a non-discharge part by a simple electrode structure by coating an electrode with a dielectric whose region for electrode discharge has a larger specific dielectric constant and region for no discharge has a smaller specific dielectric constant. CONSTITUTION:In a constitution wherein a high voltage is impressed between a ground side electrode and a high voltage side electrode, thus producing the discharge 15 between both the electrodes, at least one of both electrode tubes 8 is coated with two kinds of dielectric whose region for discharge has a large specific dielectric constant and region for no discharge has a smaller specific dielectric constant. Thereby, the discharge part 16 and the non-discharge part 17 are formed on the electrode tube 8, and an inlet 12 and an outlet 13 for cooling water are provided in the neighborhood of both ends of each of these both electrodes. Such a constitution enables clearly perform division between the discharge part 16 and the non-discharge part 17 by the simple electrode structure.

Inventors

• 👤 Takeshi Kitsukawa
• 👤 橘川　彪
• 👤 Satoru Hayashi
• 👤 悟 林

Bibliographic Details