Vacuum exhaust device

Abstract

Abstract PURPOSE:To enable the rotational frequency of a motor to be varied in response to pressure by connecting a pressure sensor provided on the way of a pipe for connecting a vacuum tank to a mechanical booster pump with an inverter connectively inserted in a power supply wiring of the motor. CONSTITUTION:When the internal pressure in a vacuum tank 1 is evacuated from the atmospheric pressure condition, a mechanical booster pump 3 and an auxiliary pump 9 are operated simultaneously. Then, the pressure condition in the vacuum tank 1 is detected bb a pressure sensor 6 so that the detecting signal is sent to an inverter 12 through a controller 11 for converting the frequency of power supply corresponding to the pressure in the inverter 12. The rotational frequency of a motor 2 is varied by this conversion of the frequency to vary the capability of the mechanical booster pump 3.

Inventors

• 👤 Chutaro Hiraide
• 👤 平出　忠太郎

Bibliographic Details