Prober

Abstract

Abstract PURPOSE:To position probe needles and a pad relatively and automatically on the exchange of probe cards by providing a probe needle position measuring device each measuring positions in a plane of each probe needle. CONSTITUTION:When kinds of components to be measured change and the probe card 21 is exchanged, an XY table 2 is positioned at an alignment position 4, a dummy wafer 7 is placed on a chuck 6, and the height of the dummy wafer 7 is aligned and the dummy wafer is aligned in parallel. The surface of the dummy wafer 7 is pushed against the probe needle 22 of the probe card 21 exchanged. An initial needle mark 23 is formed to the surface of the dummy wafer 7 by the push. The needle mark is formed, the chuck 6 is dropped, and the XY table 2 is returned to the alignment position 4 and the prober is positioned. The XY table 2 is forwarded in the predetermined XY directions while irradiating a laser 9 from an optical system 10 to the surface of the dummy wafer 7 with the needle mark 23, and a laser spot is scanned relatively to each needle mark 23. The formation of the needle mark, the measurement of the needle mark and the formation of the needle mark are repeated, and accuracy is improved gradually.

Inventors

• 👤 Ryuichi Takagi
• 👤 隆一 高木

Bibliographic Details