Sputtering device

Abstract

Abstract PURPOSE:To improve using efficiency with extremely compact constitution, by placing slender targets of a rectangular strip shape so as to face each other to form opposed targets, disposing transfer rolls on both sides of the long side theeof and forming a film while transferring a polymer film. CONSTITUTION:A titled device is constituted of two sets of opposed targets T1, T2 consisting of two sheets each of rectangular striplike targets TA1, TB1, TA2, TB2 of the same shape placed to face each other at a prescribed space, magnets 301-304 which are provided behind said targets and forming magnetic field vertical to the targets, supporting rolls 101-103, 15-154 which are provided so as to face each other spacially on both sides of the long side of the targets T1, T2 and revolve at a prescribed speed and substrate transfer means 61, 62 which transfer a film 20 in tight contact with the supporting rolls so as to face each other spacially.

Inventors

• 👤 Sadao Kadokura
• 👤 貞夫 門倉
• 👤 Kazuhiko Honjo
• 👤 本圧　和彦

Bibliographic Details